XE 100 AFM
Manufacturer
PARK SystemsApplication Fields
Versatile, Research-Grade AFM with Motorized Optics
The XE-100 is our flagship AFM. It is a mid-priced system that provides the ultimate AFM/SPM solution for
Non-Contact nanoscale metrology of small samples in data storage, semiconductors, materials science,
polymers, electrochemistry and other applications in nanoscience and engineering.
The XE-100 is our flagship AFM. It is a mid-priced system that provides the ultimate AFM/SPM solution for
Non-Contact nanoscale metrology of small samples in data storage, semiconductors, materials science,
polymers, electrochemistry and other applications in nanoscience and engineering.
- Supports all XE modes and options
- Up to 100 µm × 100 µm XY scan range
- Up to 25 µm Z scan range
- Motorized optics stage
- Ultimate in user convenience





