KLA Instruments

Metrology Tools and Defect Inspection Instruments

Kla Tencor's website

The KLA-Tencor series of benchtop stylus and optical profilometers offer the most complete range of stylus measurement features to meet the needs of the engineering and research communities. These research-grade surface profilometer products merge capability and value with the tool performance expected from KLA-Tencor’s metrology products.

Last News

12/07/2021

July 19th to 23rd, 2021 (Berlin, Paris,…) - KLA Instruments™ Nanomechanical Testing European eUser Meeting

Products List

Sheet Resistance Mapping

R50/R54-Series

Filmetrics R50-4PP

Sheet Resistance Mapping

InSEM HT

InSEM HT High Temperature InSEM Nanomechanics

Stable and dynamic mechanical properties characterization up to 800 Degrees Celsius

NanoFlip Nanoindenter

Nanomechanics NanoFlip Nanoindenter

Versatility at its core

InSEM Microprobe

InSEM Microprobe

The InSEM is a tool for characterizing the mechanical properties of surfaces or structures, which is designed to function with sub-nanometer resolution in an in-situ vacuum environment such as an SEM or FIB.

iNano Nanoindenter

iNano Nanoindenter

The World's Best Nanoindenter

Contact Profilometers

P-17 Stylus Profiler

Kla Tencor - P-17 Stylus Profiler

This instrument is available in all South-East Europe countries except Italy

P-7 Stylus Profiler

Kla Tencor - P-7 Stylus Profiler

This instrument is available in all South-East Europe countries except Italy

MicroXAM 1200 - 3D non-contact profilometer

MicroXAM 1200 - 3D non-contact profilometer

This instrument is available in all South-East Europe countries except Italy

P16+ Stylus Profiler Compact, Advanced Surface Profiling

P16+ Stylus Profiler Compact, Advanced Surface Profiling

This instrument is available in all South-East Europe countries except Italy

P-6 Stylus Profiler - Surface Profilometer

Kla-Tencor P6 Stylus Profiler

This instrument is available in all South-East Europe countries except Italy

MicroXAM-100 - 3D Surface Profilometer and Optical Interferometer

MicroXAM - 100

This instrument is available in all South-East Europe countries except Italy

Alpha-Step IQ Surface Profiler

Alpha-Step IQ Surface Profiler

This instrument is available in all South-East Europe countries except Italy

AlphaStep® D-600 Stylus Profiler

We distribute this instrument in all South-East Europe countries except Italy

Alpha-Step ® D-500 Stylus Profiler

We distribute this instrument in all South-East Europe countries except Italy