Test Structures

  • SHS: Step Height Standards -

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    AppNano - SHS: Step Height Standards

    Applied NanoStructures' Step Height Standards are uniquely designed for X,Y, and Z calibration of scanning probe microscopes and profilometers. AppNano's Step Height Standard features are defined in thermally grown silicon dioxide on silicon substrate. A layer of Cr is deposited to harden the...

  • HOPG -

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    Mikromasch Test Structures HOPG

    Highly ordered pyrolytic graphite (HOPG) is a lamellar material and consists of stacked planes. Carbon atoms within a single plane interact more strongly than with those in adjacent planes.
    Each atom within a plane has three nearest neighbors, resulting in a honeycomb-like structure. This...

  • PA Series -

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    Mikromasch Test Structures PA Series

    Sample for characterization of tip shape with hard sharp pyramidal nanostructures. The structures are covered by a highly wear-resistant layer.

    The exact shape of the scanning probe tip is very important for obtaining AFM images of high quality and accuracy. As new AFM tips with nanometer...

  • TGX Series -

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    Mikromasch Serie TGX

    The silicon calibration grating TGX is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.

     

    TGX calibration gratings are intended for determination of the tip aspect ratio and...

  • TGXYZ Series -

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    Mikromasch Test Structures TGXYZ Series

    Calibration gratings from the TGXYZ series are arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer. The small square in the center with dimensions 500 μm by 500 μm includes circular pillars and holes, as well as lines in the X- and Ydirection with a...