OCI Vacuum Microengineering

LEED and Auger Spectroscopy UHV Systems Since 1990

OCI Vacuum Microengineering Inc. is a manufacturer of basic surface analytical tools for thin films based on Auger electron spectroscopy (AES), low energy electron diffraction (LEED), mass spectrometry, ion and electron sources. The main application of low energy electron diffraction (LEED) and Auger electron spectroscopy (AES) is to measure two dimensional surface crystallography and ultra-thin elemental composition.

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