Use it to form metal thin film on the surface of sample which is non-conductive or which has got weak conductivity.
When it is necessary to analyze the image or components using a scanning electron microscope (SEM), the image distortion occurs due to charge-up phenomenon of non-conductive objects, making normal measurement is difficult. Since the image is distorted due to the accumulation of charged particles on the surface of the non-conductive sample by the electron beam, the sputtering (coating) process must be performed.
The Ion Sputtering Coater is an essential pre-treatment equipment of sample for SEM with competitiveness in miniaturization, convenient use and low cost.
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Ion Sputter Coater
- Tempered Glass for Chamber (Detachable)
- Ultra-light weight coater (10kg)
- 7 inch wide touch screen
- Convenient service by BOARD composing for each function
Vacuum Pump - " Oil Rotary Pump " - optional
- Pumping Speed : 100L/min
Coating Material " Au or Pt "
- Au(4N) : 50mm(D)
- Pt(3N5) : 50mm(D)
- Gold target provided
Accessory - " Manual, Hose, Cable "
- Manual (Install/Quick Guide)
- Clamp
- 1.5M Vacuum Hose
- Power Cable
Technical Features
- Convenient control with 7 inch Touch Display
- Vacuum → Auto Coating → Vent control by one-touch
- Library : Save frequent use conditions (max 10)
- 7 pieces of Sample Stub (Φ14㎜) mounting together in chamber
- Prevention damage on sample thanks to the low voltage coating (1 to 10mA)
- Minimize installation space because of the compact size
Model | G20 |
|---|---|
Degree of Vacuum | 2.0 x 10-1Torr |
Ion Current | 1 to 10mA (1mA/step) |
Target Material | Au or Pt |
Chamber Size | 140mm(D) x 100mm(H) |
Sample Stage | 50mm(D) x 30mm(H) |
Target Size | 50mm(D) |
Sputter Time | 1 to 600sec (1sec/step) |
Vacuum Pump | 100L/min, Rotary Pump |
Power | 110~220VAC ±10%, 50/60Hz |
Dimension | Main : 380(W)x240(D)x250(H)mm, 10kg |