Model IG70 IONEC

Ion Sputtering Gun

The IONEC Model IG70 will meet your requirements for high performance sputter ion gun while maintaining simplicity in its design and an economy in its use of vacuum chamber space.

The IONEC, a miniature ion sputtering gun, is an instrument designed for cleaning sample surfaces and depth profiling for Auger Electron Spectroscopy. The gun produces a uniform, high density, inert gas ion beam with a beam diameter from 5 to 20mm. The IONEC IG70 combines an enhanced ion source with an electrostatic lens configuration for accelerating and focusing the ion beam. The entire device is mounted on a 23/4" CF flange. The gun has a port to admit gas directly into the ionization region and a port to differentially pump the lens region. This will maximize the pressure differential between the main chamber an the ion source.


  • enhanced ion source for increased beam intensity
  • 2 3/4" CF flange mounting
  • direct gas inlet to ion source
  • port for differential pumping
  • direct filament mounting on the 23/4" CF flange feedthrough
  • variable beam energy from 0 to 3keV, digital panel meters, remote control of beam energy and computer programming

Technical Features

  • Ion Source: Electron impact ionization in magnetic field
  • Ionization Cathode: Tungsten - Rhenium filament mounted directly on 2 3/4" CF flange
  • Beam Size: Adjusted by focus voltage to 5 - 20mm
  • Beam Current: 16µA at 3keV energy and 5x10 -6 Torr of Ar +
  • Beam Energy: Variable from 0 to 3000eV
  • Mounting: 2.75" (70mm) O.D. CF flange
  • Bakeability: Up to 220°C
  • Overall Sizes: 30mm lens diameter, 130mm distance between mounting flange and filament feedthrough (180 mm including), 100mm width and 70mm depth