S mart 2

New integrable areal confocal head - The only autonomous areal confocal profilometer in the market

The S mart 2 is the only autonomous areal confocal profilometer in the market. Its powerful features and the compact design turns it into a breakthrough in the optical field. Its narrow width (90 mm) allows the integrable head to be installed in zones that will not interfere with the user or the manufacturing operations. Designed to be exceptionally easy to integrate, the S mart 2 has all the electronics inside the head, including the computing power. Temperature is crucial for the proper performance of a metrological tool. Sensofar's solution is a high-efficient passive cooling system to keep the system ready to work at any time. The S mart 2 areal confocal capability images an area at a time, so the lateral resolution and X and Y remain the same, unlike point or line confocal chromatics.

To scan with the most suitable technology, the S mart 2 comes with three technologies to measure in the same head: Ai Focus Variation, Confocal , and Interferometry. Just focus on the surface and S mart sensor will do the rest. The sensors product portfolio of Sensofar has been designed to fulfill the automatization typically required in manufacturing lines.

The measurement is done with just one click, the sensor finds the focus, optimizes the light and Z range and the user gets the result.

Videos

S mart 2, the new integrable areal confocal head from Sensofar

Files

AttachmentSize
PDF icon Integratable Heads Sensofar Brochure7.56 MB
PDF icon S Mart Leaflet490.24 KB
Adaptable to your sample

A newly developed software interface, SensoSCAN 6, offers an exceptionally intuitive interface and includes customizable tool features. In addition, new and powerful analysis algorithms have been especially designed for automated in-line process applications. All of these features are easily accessible system-wide using the provided SDK.

Remote software platform, SDK

Thanks to the three technologies incorporated into the sensor head, the S mart can cope with a variety of surface types and topologies. In particular, the S mart has been designed to perform well in industrial tooling applications.

Technical Features

Objective Lenses
Brightfield

MAG

2.5X

5X

10X

20X

50X

100X

150X

NA

0.075

0.15

0.30

0.45

0.80

0.90

0.95

WD (mm)

6.5

23.5

17.5

4.5

1.0

1.0

0.2

FOV (1) (mm)

6800x5675

3378x2826

1689x1413

845x707

338x283

169x141

113x94

Spatial sampling (2) (µm)

5.52

1.38

0.69

0.34

0.13

0.07

0.05

Optical resolution (3) (µm)

2.23

0.94

0.47

0.31

0.18

0.16

0.148

System noise (4) (nm)

300

100

30

8

5

3

1

Maximum slope (5) (º)

3

9

17

27

44

64

72

Interferometric

MAG

5X

10X

20X

50X

100X

NA

0.13

0.30

0.40

0.55

0.70

WD (mm)

9.3

7.4

4.7

3.4

2.0

FOV (1) (µm)

3400x2837

1700x1420

850x710

340x284

170x142

Spatial sampling (2) (µm)

2.76

1.38

0.69

0.28

0.14

Optical resolution (3) (µm)

2.76

1.38

0.69

0.30

0.24

System noise (4) (nm)

1

1

1

1

1

Maximum slope (5) (º)

3

8

14

21

42

  • 1 Maximum field of view with 2/3" camera and 0.5X optics.
  • 2 Pixel size on the surface.
  • 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for white LED.
  • 4 System noise measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment.
  • 5 On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.
System specifications

Measuring principle

Confocal, CSI and Focus Variation

Measurement types

Image, 3D, 3D thickness, profile and coordinates

Camera

1.2Mpx: 1232x1028 pixels (28 fps)

Confocal frame rate

9,5 fps

Vertical scan range

Linear stage: 40 mm range; 2 nm resolution

Max. Z measuring range

PSI 20 µm; CSI 10 mm; Confocal & Ai Focus Variation 34 mm

LED light sources

white 575 nm (default, lifetime 40.000 h – other options available)

Nosepiece

6 position fully motorized

Sample reflectivity

0.05 % to 100%

Advanced Software Analysis

Inc: SensoVIEW; Op: SensoPRO, SensoMAP

Software communication

DLL (C++ or C#, Windows 10® - 64 bits) - XML (any operating system)

Computer

Latest INTEL processor

Operating system

Microsoft Windows 10®, 64 bit

Cable Length

10 m

Environment

Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <2000 m