The Five Axis 3D optical profiler combines a high-accuracy rotational module with advanced inspection and analysis capabilities. This enables automatic 3D surface measurements at defined positions which combine to create full 3D volumetric measurements. Three measurement technologies cover a wide range of scales, including form (focus variation), subnanometric roughness (interferometry) or critical dimensions that require high lateral as well as vertical resolution (confocal).
The Five Axis 3D optical profiler combines a high-accuracy rotational module with advanced inspection and analysis capabilities. This enables automatic 3D surface measurements at defined positions which combine to create full 3D volumetric measurements. Three measurement technologies cover a wide range of scales, including form (focus variation), subnanometric roughness (interferometry) or critical dimensions that require high lateral as well as vertical resolution (confocal).
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