S Neox Five Axis 3D optical profiler

Full 3D measurement solution

The Five Axis 3D optical profiler combines a high-accuracy rotational module with advanced inspection and analysis capabilities. This enables automatic 3D surface measurements at defined positions which combine to create full 3D volumetric measurements. Three measurement technologies cover a wide range of scales, including form (focus variation), subnanometric roughness (interferometry) or critical dimensions that require high lateral as well as vertical resolution (confocal).


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