MikroMasch® is a well known manufacturer of inexpensive AFM probes and test gratings.
MikroMasch offers a big variety High Quality AFM probes and test structures. MikroMasch products are compatible with the microscopes of all major SPM manufacturers, including Bruker (Veeco, Digital Instruments, ThermoMicroscopes), Keysight (Agilent, Molecular Imaging), Oxford Instruments - Asylum Research, Park, NTMDT, JEOL, and others.