The first simultaneous reconstructions of both optical topography and intensity image out of a single hologram acquired in off-axis configuration were demonstrated by Lyncée CTO Etienne Cuche and his co-workers.
The principle of this new full field imaging method is demonstrated for
reflection microscopy
transmission microscopy
lens-less set ups
Many commercial applications are foreseen for both bio-imaging and material sciences applications.
DHM® specifications in 1999
Camera 512x512 pixels, 8 bits
Reconstruction rate ≈ 1 Hz
Vertical resolution ≈ 10 nm
... to revolutionary and matured applications in 2021
The Journal of Physics Photonics reports cutting edge commercial metrology applications exploiting the DHM unique specificities:
Camera frame data acquisition rate: up to 100 kHz @ 1 MPixels
Real time data display: > 60 fps
Interferometric: subnanometer vertical resolution
In-situ measurements: in air, liquids, vacuum, ...
Metrology certifications
As a non-scanning technology, DHM refers purely to laser wavelengths for height measurements. The measured height values do not depend on any scanning calibration, precise positioning, absence of long term drift, repeatability of interferometric piezo-controller, or on any motorized displacement.
3D optical profilometry
Topography measurements with interferometric resolution in the folllowing domains:
Semiconductor
Micro-optics
Micro-nano systems
Smart surfaces and polymers
Microfluidics
Watch industry
4D (Time-resolved 3D)
Acquisition at camera rate @ 194 fps standard and optionaly >100 kfps enables characterization of samples real time response due to:
Chemical action electro deposition, corrosion, etching, dissolution …
Mechanical forces material release, pressure, tribology indentation …
Light irradiance
Electromagnetic forces
...
Large surfaces measurements
Automated samples stages in conjunction with fast acquisiton rates and short acquisition time (i.e short camera shutter duration) enables:
Stitching over large areas
Full wafer inspection
Fast defects screening
In the signature recognition application shown here, the Institute of Forensic Sciences in Shanghai, China, measure surface of 20 mm x 30 mm, i.e. 3000 single images in less than 60 seconds.
Environmental & in-situ
Measurementsunsensitive to environmental disturbances such as:
Vibrations
High temperature turbulences
Cryogenic environement
Sample floating on liquid interface
...
Measurement of samples in air, gas, vacuum and liquid.
On-flight characterization
Characterization of samples in motion, without stopping for acquisition.
Applications exemples:
Quality control on convey trays
Continuous roughness control
Feedback to manufacturing tools
Moving micro-objects and robots
...
MEMS: time and frequency
From DC to 25 MHz characaterization of:
Actuators & micro-motors
Ultrasonic transducers (MUT)
Accelerometers & Gyroscopes
MOEMS and variable lenses
Micromiorrors & DMDs
Microphones & resonators
Liquid Crystal on Silicon (LCOS)
Surface Acoustic Waves (SAW)
...
Polarization
Birefringence is a central and key property for characterizing
Liquid crystal displays,
Optical telecom devices,
MOEMS,
Photonics crystals
Forces and stress analysis
Metasurfaces
...
Thin transparent structures
Measure topography, thicknesses and refractive indexes of transparent structures
Measurement of surface structures from 10 nanometers to several microns
Measurement of refractive indices
Characterization of deposited or etched structures composed of up to 3 layers
Measure as you manufacture
Measuring in-situ and in-real time a substrate during its manufacturing provides immediate feedback for optimizing micro and nano processes:
Metrology Applications using Digital Holography Microscopy (DHM®): from pioneer work to advanced applications
From Pioneer work in 1999...
Optics Letters (Vol. 24, No. 5) and Applied Optics (Vol. 38, No. 34)
The first simultaneous reconstructions of both optical topography and intensity image out of a single hologram acquired in off-axis configuration were demonstrated by Lyncée CTO Etienne Cuche and his co-workers.
The principle of this new full field imaging method is demonstrated for
Many commercial applications are foreseen for both bio-imaging and material sciences applications.
DHM® specifications in 1999
... to revolutionary and matured applications in 2021
Journal of Physics: Photonics
The Journal of Physics Photonics reports cutting edge commercial metrology applications exploiting the DHM unique specificities:
As a non-scanning technology, DHM refers purely to laser wavelengths for height measurements.
The measured height values do not depend on any scanning calibration, precise positioning, absence of long term drift, repeatability of interferometric piezo-controller, or on any motorized displacement.
Topography measurements with interferometric resolution in the folllowing domains:
Acquisition at camera rate @ 194 fps standard and optionaly >100 kfps enables characterization of samples real time response due to:
thermal expansion, melting, evaporation …
electro deposition, corrosion, etching, dissolution …
material release, pressure, tribology indentation …
Automated samples stages in conjunction with fast acquisiton rates and short acquisition time (i.e short camera shutter duration) enables:
In the signature recognition application shown here, the Institute of Forensic Sciences in Shanghai, China, measure surface of 20 mm x 30 mm, i.e. 3000 single images in less than 60 seconds.
Measurements unsensitive to environmental disturbances such as:
Measurement of samples in air, gas, vacuum and liquid.
Characterization of samples in motion, without stopping for acquisition.
Applications exemples:
From DC to 25 MHz characaterization of:
Birefringence is a central and key property for characterizing
Measure topography, thicknesses and refractive indexes of transparent structures
Measuring in-situ and in-real time a substrate during its manufacturing provides immediate feedback for optimizing micro and nano processes:
Related products
REFLECTION DHM® - Reflection configured holographic microscopes
HIGH SPEED DHM®
TRANSMISSION DHM®
Digital Holographic Macroscope
Digital Holographic Camera
Lens-Less sensor
Partner
Lyncée Tec