High Aspect Ratio Tilted Probes

AppNano manufactures probes with various spike lengths and widths for trenches and deep features. SPM/AFM instrument manufacturers use different probe chip mounting angles. AppNano provides options to meet all commercial AFM systems. Additionally, we can fabricate HART probes to meet custom dimensions.

Example Part Number: HART3-2-5

First Digit - Tilt Compensation:

• 0 for 0° Tilt
• 3 for 3° Tilt
• 12 for 12° Tilt

Second digit - Spike Length

• Length 1 μm
• Length 2 μm
• Length 4 μm
• Length 6 μm

Third digit - Quantity

• 5 Probe Box*
• 50 Probe Box*

Example Part Number (with Reflex Coating): HARTA3-2-5

A - Al Reflex Side Coating

Spike Tilt: HART probe spikes are offered with three tilt variations (0°, 3°, 12°). By offsetting the AFM systems natural mounting tilt, the spike is arranged perpendicular to the surface.

Spike Properties

• Heavily Doped (0.01—0.025 Ohm-cm) Single Crystal Si
• Focused Ion Beam Milled
• Tip ROC: >20nm