Calibration gratings from the TGXYZ series are arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer. The small square in the center with dimensions 500 μm by 500 μm includes circular pillars and holes, as well as lines in the X- and Ydirection with a pitch of 5 μm. The large square with dimensions 1 mm by 1 mm contains square pillars and holes with a pitch of 10 μm.
The TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners. The vertical non-linearity can be compensated for by using several calibration gratings with different nominal step heights.