TGXYZ Series

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Calibration gratings from the TGXYZ series are arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer. The small square in the center with dimensions 500 μm by 500 μm includes circular pillars and holes, as well as lines in the X- and Ydirection with a pitch of 5 μm. The large square with dimensions 1 mm by 1 mm contains square pillars and holes with a pitch of 10 μm.

The TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners. The vertical non-linearity can be compensated for by using several calibration gratings with different nominal step heights.

Files

Technical Features

Active area ....................................... 1 x 1 mm
Chip dimensions ....................................... 5 x 5 x 0.3 mm

Part numberStep heightHeight AccuracyPitchPitch Accuracy
TGXYZ0120 nm2%5 and 10 μm0.1 μm
TGXYZ02100 nm3%5 and 10 μm0.1 μm
TGXYZ03500 nm3%5 and 10 μm0.1 μm