Calibration gratings from the TGXYZ series are arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer. The small square in the center with dimensions 500 μm by 500 μm includes circular pillars and holes, as well as lines in the X- and Ydirection with a pitch of 5 μm. The large square with dimensions 1 mm by 1 mm contains square pillars and holes with a pitch of 10 μm.
The TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners. The vertical non-linearity can be compensated for by using several calibration gratings with different nominal step heights.
Files
Technical Features
Active area ....................................... 1 x 1 mm
Chip dimensions ....................................... 5 x 5 x 0.3 mm
| Part number | Step height | Height Accuracy | Pitch | Pitch Accuracy |
|---|---|---|---|---|
| TGXYZ01 | 20 nm | 2% | 5 and 10 μm | 0.1 μm |
| TGXYZ02 | 100 nm | 3% | 5 and 10 μm | 0.1 μm |
| TGXYZ03 | 500 nm | 3% | 5 and 10 μm | 0.1 μm |