Ultimate Active Isolation System for Electron Microscopes

Designed for High-Performance Electron Microscopes

DVIA-MB is the ultimate base active vibration isolation platform for all commercial electron microscopes such as SEM and TEM. DVIA-MB provides the optimal environment, enabling electron microscopes to obtain high-resolution images of biological and non-biological specimens by reducing vibrations in the critical range of 1 - 5 Hz where the electron microscopes are extremely susceptible to the low frequency vibration.

Superior Active Vibration Isolator

DVIA-MB consists of four units of active vibration isolators in which the elements of air springs and active isolation technology are embedded. The integrated sensors and actuators effectively reduce the low frequency vibrations and starts to isolate vibrations from 0.5 Hz, achieving 90% vibration isolation at 2 Hz. The elements of air springs support payloads from 500 kg to 6000 kg and effectively reduces high frequency vibrations and, moreover, they lowers its natural frequency.

Nanoscale imaging with high resolutions

As per the images clearly above demonstrate, when low frequency vibrations disturb electron microscopes, it is critical to reduce these vibrations with DVIA-MB in order to obtain nano-scale resolution images.

Overcomes Limits of Passive Isolation Systems

The natural frequency of DVIA series is below 0.5 Hz, meaning that DVIA series effectively reduces low frequency vibrations in 1– 5 Hz, where passive isolation systems rather amplify the low frequency vibrations due to its higher natural frequency.

Unbeatable vibration isolation performance

The resonant frequency of the active isolation systems is much lower than the passive isolation systems.

As the graphs above evidently shows, the active systems excels in controlling vibrations in 1-10 Hz range, where the passive systems amplify the low frequency vibrations rather than filtering them.

DVIA-MB is highly effective in isolating ultra-precision instruments from the low frequency vibrations where the precision instruments tend to be unstable and disruptive. Active vibration isolation starting at 0.5 Hz, DVIA-MB achieves in delivering 90% at 2 Hz and 99% at 10 Hz.

Feed-back & Feed-forward algorithms

DVIA-MB uses the feedback control system to continuously detect vibrations disturbing an isolated payload base and instantaneously react to minimize the vibrations in real-time. The feed-forward system is employed in DVIA-MB to filter out floor vibrations in a predefined way.

Controlling vibrations in all six degrees of freedom

Inertial sensors and electromagnetic actuators that are installed in the active vibration isolation systems detect and control vibrations in three translational degrees of motions ( X,Y and Z), and three rotational degrees of motions ( pitch,roll and yaw).


Technical Features

Model No.DVIA-M1000DVIA-M3000DVIA-M6000
Dimensions (WxDxH) - Isolator Unit180 x 180 x 180 mm232 x 232 x180 mm308 x 308 x 180
Dimensions (WxDxH) - PlatformCustomize to FitCustomize to FitCustomize to Fit
Maximum Load Capacity500 -1700 kg1500 - 3500 kg3000 - 6000 kg
Active Isolation Range0.5 - 100Hz0.5 - 100Hz0.5 - 100Hz
Degrees of Freedom6 degrees6 degrees6 degrees
Vibration Isolation Performance≥ 90% at 2 Hz / 99% at 10 Hz≥ 90% at 2 Hz / 99% at 10 Hz≥ 90% at 2 Hz / 99% at 10 Hz
Settling Time≤0.3 sec*≤0.3 sec*≤0.3 sec*
Input Voltage (V)AC 80 - 260 V / 50 - 60 HzAC 80 - 260 V / 50 - 60 HzAC 80 - 260 V / 50 - 60 Hz
Power Consumption (W)Maximum 110 W. Below 50W in normal operation Maximum 110 W. Below 50W in normal operationMaximum 110 W. Below 50W in normal operation
Operating Range - Temperature (°C)5 - 50 °C5 - 50 °C5 - 50 °C
Operating Range - Humidity (%)20 - 90%20 - 90%20 - 90%
Required Air Pressure≥5 kg/cm2 ≥5 kg/cm2≥5 kg/cm2

* 0.3 sec settling time is measured after 90% reduction of input. The settling time varies with several conditions, such as payload, force, natural frequency, etc...