Lens-Less sensor

Fixed field of view DHM®, unique patented design, robust and ideal for industrial application

The Lens-less sensor is a fixed field of view DHM®, this unique patented design is robust and ideal for industrial applications. The reflection configuration measures 3D topography with a sub-nanometric resolution.

Digital holography offers significant advantages compare to others 3D optical profilometer :

  • Fast measurement
  • Insensitive to surrounding vibrations
  • Digital focalization : doesn't require mechanical displacement
  • The laser wavelength is the height reference: no drawbacks from scanning mechanisms


Wafer inspection using digital holography microscopy
Ideal for automation
  • Compact design for easy integration
  • Camera outside of the main body for easy maintenance
  • External laser source for easy integration and maintenance
Adapted to your needs
  • Single or dual wavelength configuration
  • Long coherence laser source on request
  • High resolution sensor on request

Technical Features

  • Field of view : 6mm x 6mm
  • Lateral resolution : 10 um
  • Vertical resolution : 0.5 nm
  • Working distance : 10 mm
  • Acceptance angle : 0.8°
  • CMOS Camera : 4 Mpx