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- 15/05/18 - LiteScope™ - A unique AFM accessory for SEM ›
SmartWLI profilometry quality now integrated in production lines!
The accelerated smartWLI's getting now integrated in production lines. With high-speed cameras and real time calculation of the point cloud on graphic boards achieve the GBS now with white-light interferometers height resolutions of 0.1 nm and cycle times below 1 s. The image acquisition with up to 3 kHz reduce the influence of vibrations. This makes the operation of smartWLI sensors without extensive dumping systems possible.
Particularly labor measuring systems capture with high resolution cameras up to 5 MP details which could be measured otherwise only with high magnification objectives and xy tables. This simplify the operation and saves time and money.