KLA Instruments
Metrology Tools and Defect Inspection Instruments
The KLA-Tencor series of benchtop stylus and optical profilometers offer the most complete range of stylus measurement features to meet the needs of the engineering and research communities. These research-grade surface profilometer products merge capability and value with the tool performance expected from KLA-Tencor’s metrology products.
Products List
Sheet Resistance Mapping
Sheet Resistance Mapping
Contact Profilometers
Contact Profilometers