Hardened DLC coated silicon probes
Category:
The HARD series silicon etched probe tips have pyramidal shape. The probes are coated with a hard DLC film. The backside of the cantilevers is coated with the 30 nm aluminium reflective film.
Typical tip radius .......................................... < 20 nm
Tipside coating ..........................................DLC 20 nm
Backside coating ......................................... Al 30 nm
Technical Features
| Cantilever Series | Available Coatings | Length ±5µm | Width ±3µm | Thickness ±5µm | Res. Freq. kHz Typ | Res. Freq. kHz Range | Const. Force N/m Tipica | Const. Force N/m Range |
|---|---|---|---|---|---|---|---|---|
| HQ:NSC14 | /Hard/Al BS | 125 | 25 | 2.1 | 160 | 110 - 220 | 5.0 | 1.8 - 13 |
| HQ:NSC15 | /Hard/Al BS | 125 | 30 | 4.0 | 325 | 265 - 410 | 40 | 20 - 80 |
| HQ:NSC16 | /Hard/Al BS | 225 | 37.5 | 7.0 | 190 | 170 - 210 | 45 | 30 - 70 |
| HQ:CSC17 | /Hard/Al BS | 450 | 50 | 2.0 | 13 | 10-17 | 0.18 | 0.06 - 0.40 |
| HQ:NSC35 | 3 levers | |||||||
| HQ:NSC35 lever A | /Hard/Al BS | 110 | 35 | 2.0 | 205 | 130 - 290 | 8.9 | 2.7 - 24 |
| HQ:NSC35 lever B | /Hard/Al BS | 90 | 35 | 2.0 | 300 | 185 - 430 | 16 | 4.8 - 44 |
| HQ:NSC35 lever C | /Hard/Al BS | 130 | 35 | 2.0 | 150 | 95 - 205 | 5.4 | 1.7 - 14 |
| HQ:NSC36 | 3 levers | |||||||
| HQ:NSC36 lever A | /Hard/Al BS | 110 | 32.5 | 1.0 | 90 | 30 - 160 | 1.0 | 0.1 - 4.6 |
| HQ:NSC36 lever B | /Hard/Al BS | 90 | 32.5 | 1.0 | 130 | 45 - 240 | 2 | 0.2 - 9 |
| HQ:NSC36 lever C | /Hard/Al BS | 130 | 32.5 | 1.0 | 65 | 25 - 115 | 0.6 | 0.06 - 2.7 |
| HQ:XSC11 | 4 levers | |||||||
| HQ:XSC11 lever A | /Hard/Al BS | 500 | 30 | 2.7 | 15 | 12-18 | 0.2 | 0.1 - 0.4 |
| HQ:XSC11 lever B | /Hard/Al BS | 210 | 30 | 2.7 | 80 | 60 - 100 | 2.7 | 1.1 - 5.6 |
| HQ:XSC11 lever C | /Hard/Al BS | 150 | 30 | 2.7 | 155 | 115 - 200 | 7 | 3 - 16 |
| HQ:XSC11 lever D | /Hard/Al BS | 100 | 50 | 2.7 | 350 | 250 - 465 | 42 | 17 - 90 |