AFM/SPM Probes - Series HARD

Hardened DLC coated silicon probes

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Hardened DLC coated silicon probes HARD Series - Mikromasch

The HARD series silicon etched probe tips have pyramidal shape. The probes are coated with a hard DLC film. The backside of the cantilevers is coated with the 30 nm aluminium reflective film.

Typical tip radius .......................................... < 20 nm
Tipside coating ..........................................DLC 20 nm
Backside coating ......................................... Al 30 nm

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Technical Features


Cantilever Series	Available Coatings	Length ±5µm	Width ±3µm	Thickness ±5µm	Res. Freq. kHz Typ	Res. Freq. kHz Range	Const. Force N/m Tipica	Const. Force N/m Range
HQ:NSC14	/Hard/Al BS	125	25	2.1	160	110 - 220	5.0	1.8 - 13
HQ:NSC15	/Hard/Al BS	125	30	4.0	325	265 - 410	40	20 - 80
HQ:NSC16	/Hard/Al BS	225	37.5	7.0	190	170 - 210	45	30 - 70
HQ:CSC17	/Hard/Al BS	450	50	2.0	13	10-17	0.18	0.06 - 0.40
HQ:NSC35	3 levers
HQ:NSC35 lever A	/Hard/Al BS	110	35	2.0	205	130 - 290	8.9	2.7 - 24
HQ:NSC35 lever B	/Hard/Al BS	90	35	2.0	300	185 - 430	16	4.8 - 44
HQ:NSC35 lever C	/Hard/Al BS	130	35	2.0	150	95 - 205	5.4	1.7 - 14
HQ:NSC36	3 levers
HQ:NSC36 lever A	/Hard/Al BS	110	32.5	1.0	90	30 - 160	1.0	0.1 - 4.6
HQ:NSC36 lever B	/Hard/Al BS	90	32.5	1.0	130	45 - 240	2	0.2 - 9
HQ:NSC36 lever C	/Hard/Al BS	130	32.5	1.0	65	25 - 115	0.6	0.06 - 2.7
HQ:XSC11	4 levers
HQ:XSC11 lever A	/Hard/Al BS	500	30	2.7	15	12-18	0.2	0.1 - 0.4
HQ:XSC11 lever B	/Hard/Al BS	210	30	2.7	80	60 - 100	2.7	1.1 - 5.6
HQ:XSC11 lever C	/Hard/Al BS	150	30	2.7	155	115 - 200	7	3 - 16
HQ:XSC11 lever D	/Hard/Al BS	100	50	2.7	350	250 - 465	42	17 - 90

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AFM/SPM Probes - Series HARD

Technical Features