DVIA-ML Series

The world's most advanced active vibration isolation system

The DVIA-ML series by Daeil Systems represents a cutting-edge active vibration isolation system, specifically designed for high and ultra-high resolution electron microscopes as well as other sensitive analytical instruments.

This system is equipped with advanced hardware and software, including sophisticated sensors, real-time data processing, and adaptive control algorithms, which together provide a fully controlled vibration environment, meeting the most stringent requirements that other systems fail to achieve.

Key Features:

  • Low-frequency vibration isolation: The DVIA-ML series begins isolating floor vibrations from 0.5 Hz, achieving an 80-90% isolation efficiency at 1 Hz.

  • Active vibration control in six degrees of freedom: The system handles vibrations in three translational motions (X, Y, Z) and three rotational motions (pitch, roll, yaw), ensuring optimal stability for sensitive equipment.

  • Low-profile design: With a 34% lower height compared to major competitors, the DVIA-ML platform provides a space-saving solution without compromising performance, making it ideal for compact environments, such as those housing transmission electron microscopes (TEM).

  • Highly sensitive sensors: Equipped with 11 Geophone velocity sensors with a sensitivity of 2.55 V/in/s (100.4 V/m/s), the DVIA-ML series effectively detects low-frequency vibrations, ensuring highly accurate measurements.

  • High-performance digital processor: The system features a high-performance floating-point digital signal processor (DSP), delivering 1800 MFLOPS and 2400 MIPS for a fast and precise vibration response, ensuring accurate and synchronized data processing.

Conclusion:

The DVIA-ML series by Daeil Systems offers a state-of-the-art solution for active vibration isolation, significantly enhancing the performance of electron microscopes and other sensitive analytical instruments, while maintaining a compact design and superior functionality.

Videos

Active Isolation Systems DVIA
Highly sensitive velocity sensors for accurate vibration measurements

The DVIA-ML series features 11 Geophone velocity sensors with a high sensitivity of 2.55 V/in/s (100.4 V/m/s) to effectively detect low frequency vibrations. The distortion <0.15% measured at 12 Hz with 0.7 in/s p-p displacement is very low which suggest the sensor will provide accurate measurements without introducing significant errors. Specially the velocity sensors with the higher damping value of 0.67 when loaded (20 kn), settle vibrations effectively in real-world applications.

Advanced sensor amplifier board circuit to obtain vibration signals down to around 0.3 Hz

The output of the GS-ONE is amplified using a specialized sensor amplifier board circuit that increases the gain specifically at low frequencies. This amplification ensures that the small low-frequency signals are more detectable and usable. In addition to this hardware-based amplification, a digital filter is applied to further enhance the signal. This filter is designed to boost the gain at low frequencies, correcting any attenuation that might otherwise occur. As a result of these hardware and software corrections, the GS-ONE output becomes effective for detecting and processing vibrations as low as around 0.3 Hz. This ensures that even low-frequency vibrations are captured accurately, enabling the active vibration isolation system to function optimally even at those frequencies. This elaboration emphasizes how both hardware (amplifier circuit) and software (digital filter) work together to enhance the low-frequency performance of the GS-ONE sensor. The advanced sensor amplifier board amplifies the gains of the velocity sensors at low frequencies, and the digital filter corrects these gains to effectively capture vibration signals down to approximately 0.3 Hz. This enables exceptional vibration isolation performance at 1 Hz

High-performance digital signal processor with 0.0005 seconds response time to vibration

The DVIA-ML series is equipped with a high-performance floating-point digital signal processor (DSP), delivering 1800 MFLOPS and 2400 MIPS for rapid and precise vibration response. It features 16-bit A/D converters with 19 channels and 24-bit D/A converters with 10 channels, ensuring accurate and synchronized data sampling. By leveraging advanced digital signal processing and precise converters, the system can detect and respond to vibrations with minimal delay, making it ideal for high-precision vibration isolation applications.

Less than 0.05μT Magnetic Field for optimal electron microscope performance.

The DVIA-ML series is engineered to maintain an exceptionally low magnetic field of less than 0.05μT, which is crucial for preventing interference with the highly sensitive electron microscopes. Electron microscopes, particularly high-resolution models, are extremely sensitive to magnetic fields, as even small fluctuations can distort the electron beam and affect image clarity. By minimizing the magnetic field to such a low level, the DVIA-ML series ensures that electron microscopes can operate without the risk of magnetic interference, allowing for more precise and accurate imaging and measurements. This is particularly important for applications requiring nanometer or sub-nanometer resolution, where even minor disturbances can result in significant data inaccuracies.

New PID tuning software, more PID gains, filters for stability and performance.

The new tuning software of DVIA-ML1000 provides more filters and gains to control vibration more efficiently. The number of filter slot has increased from 3 to 5 which allows us to delicately and accurately tune the active vibration isolation system. The new feedforward D gain and D frequency(Hz) provides excellent stability for tuning the active system below 10 Hz. Specially, we are able to attenuate vibration below 0.5 Hz with the new feedforward D gain control for the outstanding vibration isolation performance. The new tuning software provides the open-loop transfer function from 0.1 Hz enables us to accurately check the phase margin so that we can stably adjust gain values for the superior low frequency vibration isolation performance.

Technical Features

  • Model
    1. DVIA-ML1000
    2. DVIA-ML3000
  • Dimensions
    1. Customizable(fixed height:173 mm)
    2. Customizable(fixed height:178 mm)
  • Maximum Load Capacity
    1. 1700kg
    2. 3500kg
  • Vibration Isolation Technology
    Feedback and Feedforward Control
  • Degrees of Freedom
    6 Degrees
  • Active Isolation Bandwidth
    0.5 – 200 Hz
  • Vibration Isolation
    80 – 90% at 1 Hz
  • Actuator
    Electromagnetic Actuator
  • Maximum Actuator Force
    Vertical 40 N, Horizontal 20 N
  • Vibration Sensor
    Geophone, Sensitivity: 2.55 V/in/s (100.4 V/m/s) ± 10%
  • Leveling Repeatability
    Repeatability: ± 0.1 mm
  • Controller
    Built-in
  • Environmental Protection Requirements
    CE and TUV
  • Power Requirements
    Line Voltage: 100 – 260V AC, Line Frequency: 50/60 Hz
  • Air Requirements
    Air Pressure: 4 – 6 bar, Air Delivery: 10 L/min
  • Environmental Requirements
    Temperature: 5 – 50 °C, Humidity: 20 – 90 %