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The Hastings HFM-200 mass flow meter and HFC-202 flow controller are designed to accurately measure and control mass flow over the range of 10 sccm to 30 slm, without corrections or compensations for gas pressure and temperature with an accuracy of better than ±1% FS. Hastings mass flow instruments do not require any periodic maintenance under normal operating conditions with clean gases. No damage will occur from the use of moderate overpressures (~500 psi/3.45MPa) or overflows. Instruments are normally calibrated with the appropriate standard calibration gas (nitrogen) then a correction factor is used to adjust the output for the intended gas.
