FINAL PROGRAMME - Workshop: State of the art in 3D Surface Metrology - Rovigo - July 26, 2017

1) New confocal technologies. Towards the Universal 3D Optical Metrology Technology
Sensofar Metrology has developed new innovative software features for their 3-in-1 S-line 3D surface metrology systems. Two new measurement technologies –Confocal Fusion & Continuous Confocal– represent significant new developments in 3D surface metrology, and underline Sensofar’s technological lead in this field. 

We will review:

• Confocal Fusion: main principle, test results, examples
• Continuous Confocal: standard confocal technique, how it works, test results.

2) ISO25178 Surface Texture Parameters & Roughness Measurements

Practical applications and guidelines for implementing ISO 25178. Topics that will be reviewed:

• The need for 3D texture analysis as compared with line-profiles
• A basic description of the ISO parameters
• The concept of spatial frequencies and filters – form, waviness, and roughness
• Examples and rough guidelines for analysis and parameter choice

3) New Sensors for in-line metrology and the 5-axes S neox

Our two in-line systems have primarily been designed to be compact, robust and easily integrated. The next priority was to align their specific strengths to those performance characteristics that are actually required in a production environment.

The S mart addresses the need for ultimate measurement flexibility in an in-line capable package, and is positioned as the most versatile industrial system on the market.

The S onix provides the speed required in a high-throughput industrial metrology system. With its high-speed camera and optimized optical and mechanical design, S onix is up to 7 times faster than other interferometric systems available today. Vertical resolution has been maintained, where the advantage of high speed brings with it the added bonus of improved resistance against vibration.

The Five Axes 3D optical prof­ler combines a high-accuracy rotational module with advanced inspection and analysis capabilities. This enables automatic 3D surface measurements at defi­ned positions which combine to create full 3D volumetric measurements. Three measurement technologies cover a wide range of scales, including form (focus variation), sub-nanometric roughness (interferometry) or critical dimensions that require high lateral as well as vertical resolution (confocal).