S Neox

3D Optical Profiler for SpeedQA/QC and R&D Solution

The new S neox outperforms existing optical 3D profiling microscopes in terms of performance, functionality, efficiency and design, providing Sensofar with a class-leading areal measurement system.

You can watch and download the presentation webinar of the new S neox run by Alberto Aguerri:



Faster than ever

Everything is faster than before with new smart and unique algorithms and a new camera. Data acquisition is taken at 180 fps. Standard measurement acquisition is 5X faster than before. Making the S neox the fastest areal measurement system in the market.


Sensofar is continuously working to provide the most incredible experience to our customers. With the fifth generation of the S neox systems, the goal has been to make it easy to use, intuitive and faster. Even if you are beginner user, the system can be managed with just one click. Software modules have been created to adapt the system to the user requirements.

Versatile System

Quality Control

Automated modules have been created to facilitate all QC procedures. Ranging from operator access rights control, recipes, compatibility to barcode/QR readers, and customized plugins from our proprietary SensoPRO software to generate pass/fail reports. Our optimized solutions are able to work in QC environments due to their flexibility and easy-to-use interface, which can be programmed to work 24/7.

Research & Development

With Sensofar’s 3-in-1 approach –a single click in SensoSCAN switches the system to the best technique for the task at hand. The three measurement techniques found in the S neox sensor head –Confocal,  nterferometry, Ai Focus Variation– each contribute critically to the versatility of the system and help to minimize undesirable compromises in the data acquisition. The S neox is ideal for all lab environments,  without limitations.

3-in-1 technologies

Ai Focus VariationNEW!

Active illumination Focus Variation vertically scans either optics (with very low depth-of-field) or the sample to obtain a continuous set of images of the surface. An algorithm determines which points in each frame are in focus, and an entire image is built up using all in-focus points from all frames. It has been improved with the use of active illumination to get more reliable focus location even on optically smooth surface.


Confocal scanning is a microscopy imaging technique that utilizes an aperture at the confocal plane of the objective. Out-of-focus light is thus prevented from entering the imaging system and only the in-focus plane on the sample is captured. 2D profiles and 3D surface images can be captured by scanning the aperture mechanically or digitally.


Optical Interferometry  makes use of the optical path difference between light reflected in the two arms of the interferometer (reference and sample) to yield an spatial interference pattern (interferograms) that contains information on the surface topology of the sample. Various variations of the approach can be used for particular applications.

Thin Film

Thin film measurement technique measures the thickness of optically transparent layers quickly, accurately, non-destructively and requires no sample preparation. The system acquires the reflectance spectrum of the sample in the visible range, and is compared with a simulated spectra calculated by the software, with layer thickness modification until the best fit is found. Transparent films from 50 nm to 1.5 μm can be measured in less than one second. Sample evaluation points are dependent on the objective magnification which can be as low as 0.5 μm and up to 40 μm.

High resolution

Vertical resolution is limited by the instrument noise, which is fixed for Interferometry, but dependent of the numerical aperture for Confocal. Sensofar proprietary algorithms deliver nanometer level system noise for any measurements technique at the highest possible lateral resolution for an optical instrument.
The topography shown is a subnanometer (0.3 nm) atomic layer. Courtesy of PTB.

DIC observation

Differential Interference Contrast (DIC) is used to emphasize very small height features that has no contrast in normal observation. With the use of a Nomarski prism, an interferential image is created resolving sub-nanometer scale structures not visible in brightfield or confocal images.

Stand structure

The S neox is a complete tool. Its design is ideal for obtaining a fast, non invasive assessment of the micro and nanogeometry of technical surfaces in multiple configurations. S neox provides the flexibility, durability and efficiency required from the standard setup for R&D and quality inspection laboratories to sophisticated, customized solutions for online process controls, measuring samples up to 300×300 mm2 and maximum height up to 350 mm.

Motorized nosepiece

The motorized nosepiece can hold up to six objectives simultaneously, including brightfield and interferometry objectives. The SensoSCAN software handles the motorized change automatically and corrects automatically any possible parfocality adjustment.

Ring light

The Ring light is based on an LED ring for illuminating samples in a uniform and efficient way. It is mounted above and around the objective, the ring light provides increased signal for the Ai Focus Variation technique. This ensures proper illumination at the focal plane.

Rotational stage

The Five Axis rotational stage consists of a high-precision motorized rotating A axis with 360º of endless rotation, 1 arc sec positioning repeatability, a motorized B axis, -30º to 110º, 1 arc min positioning repeatability, with limit switch. It is equipped with a System3R clamping system.

Guided system

SensoSCAN Software drives the systems with its clear and intuitive user-friendly interface. The user is guided through the 3D environment, delivering a unique user experience. 

Sample Navigation

An overview tool helps the user to inspect the sample during measurement preparation, check measurement positions before acquisition as well as assist in the automation procedure. Working with high magnification will be easier, as you will know where you are at every moment.

Auto 3D Function

Selecting 3D Auto function, the SensoSCAN software automatically determines the correct illumination and the appropriate measurement range, and then performs the chosen measurement type. A high-quality result can thus be obtained within just a few seconds.

Analysis & Reporting

It is also possible to create analysis templates to apply pre-determined filter and operator configurations to repeated measurements. And finally, obtain a clear and well-structured report for each measurement, showing the 3D data, a 2D profile and all the ISO parameters.

Automating procedures module

Automated measurements are obtained using the Recipes tool, an easily customizable tool for creating quality control procedures. It is ideal for Quality Control inspection, and it is extremely easy to define procedures for automating measurements with the profile manager tool, sample identification, data exportation and ‘pass or fail’ criteria.

Extended measurements module

SensoSCAN’s extended measurements module allows the user to easily define the measurement layout on the surface by means of the overview image. The area can be automatically cropped to rectangular, circular or ring areas of interest. Wide areas up to 500 million pixels are possible. Several scanning strategies such us autofocusing on each field, or focus tracking to minimize vertical scanning range are available.

Powerful advanced analysis software

SensoVIEW is an ideal software for a broad range of analysis tasks.

Interactive analysis tools

3D and 2D interactive views provide multiple scaling, display and render options. A comprehensive suite of tools for preliminary examination and analysis of 3D or 2D measurements is provided. Critical dimensions, angles, distances, diameters can be measured and features highlighted with new annotation tools.

Sequential operators

A comprehensive set of operators provides the opportunity to retouch data points, restore non-measurable data, remove form (plane, sphere, polynomial), apply a range of filters and/or generate alternative layers by cropping, subtracting or extracting a profile. It is also possible to create analysis templates to apply pre-determined filter and operator configurations to repetitive measurements.

The most complete analysis suite

SensoPRO - Advanced software package optionally available.

It has never been so easy to perform fast quality control in a production line. Thanks to SensoPRO, the operator in the production line only needs to load the sample and follow guided instructions. Plug-in-based data analysis algorithms provide a high degree of flexibility. New modules can be easily customized to other industry needs.

Advanced reporting software

SensoMAP Advanced software package optionally available.

SensoMAP, based on Mountains technology from Digital Surf, is an extremely powerful tool for analysis and reporting. SensoMAP software is completely modularly adaptable to customer requirements. Two levels (standard and premium) and several modules (2D, 3D or 4D modules, Advanced Contour, Grains & Particles, Statistics and Stitching) are available.

Sensomap Modules
Advanced 2D surface texture Studies, parameters and filters for advanced 2D profile analysis
Advanced 3D surface texture Studies, parameters and filters for advanced 3D surface analysis
Contour Fast geometric dimensioning of component contours
Advanced contour Comprehensive form deviation analysis with tolerancing
Grains and particles Study isolated surface features
Colocalization Combine surface data obtained by imaging and metrology instruments of different types
4D series Visualize and analyze surface evolution
Statistics Automated statistical analysis of static and dynamic measurement data populations
3D Fourier Use advanced FFT-based tools to analyze process-surface interactions and denoise surfaces
2D automotive Assess functional performance with parameters developed by the automotive industry

Technical Features

Light Sources









Dimensions mm (inch)
Dimensions S Neox 3D - Base & Column
Dimensions S Neox 3D - Controller
Objective Lenses - Brightfield
Objective lenses - Brightfield
Confocal / Ai Focus Variation

1 Maximum field of view with 3/2” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space. Values for blue LED.   4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.   5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.

Objective Lenses - Interferometry
Objective Lenses - Interferometry

1 Maximum field of view with 3/2” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space. Values for blue LED.   4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room. Values for green LED (white LED for CSI). Resolution HD.   5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.

XYZ performance
XY performance
Z performance
Accuracy and repeatability
Accuracy and repeatability - Sensofar 3D Neox

Objective lense used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI and PSI 50X 0.55NA.
Resolution 1220×1024 pixels. All measurements are done using PZT.
Uncertainty (U) according to ISO/IEC guide 98-3:2008€ GUM:1995, K=1,96 (level of confidence 95%). σ according to 25 measures.
7 Area of 1x1mm.   8 Profile of 4mm lenght.

System configuration
System configuration - Sensofar S Neox 3D