DVIA-UB Series

Low-profile sem base platform

The DVIA-UB is a low-profile active vibration isolation platform with the integrated DVIA-U active vibration isolators, designed to isolate Scanning Electron Microscopes from low-frequency floor vibrations.

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Low-Frequency Vibration Isolation

The advanced active vibration control algorithms are embedded in the DVIA-UB series, delivering ≥90% vibration isolation at ≥4 Hz.

Low-profile active vibration isolation platform

The DVIA-UB is a low-profile base active vibration isolation platform, the optimal vibration solution for equipment with a limited space.

Easy installation

The passive mechanism of the DVIA-UB is simple that it does not require our engineers to visit the site and setup the active isolation system. Users can setup the system by simply following the user manual.

No Air

All the DVIA-UB requires eletricity to operate.

UI Software for Users

Daeil Systems takee pride in his work to provide a vibration isolation system that actually reduce floor vibrations.
The UI software is provided along with the DVIA-U series for users to monitor the real-time active vibration isolation performance and floor vibration levels.

DVIA T UI Software
Feedback & Feedforward Control Algorithm

The DVIA series uses the Feedback control algorithm to continuously detect vibrations disturbing an isolated surface and instantaneously react to minimize the vibrations in real-time. The Feed-Forward control algorithm is employed in  the DVIA Series to filter out floor vibrations in advance before the floor vibrations can be transmitted to equipment installed on the active vibration isolation systems.

Active Vibration Isolation in All Six Degrees of Freedom

The DVIA Series controls vibrations in three translational degrees of motions ( X, Y and Z) and three rotational degrees of motions ( pitch, roll and yaw).

Performances

≥90% vibration isolation at ≥4 Hz

Applications

Scanning Electron Microscopy

Technical Features

Model

DVIA-UB350

DVIA-UB700

Platform Dimensions (L x W x H)

Custom-made

Custom-made

Maximum Load Capacity

350 kg

700 kg

Actuator

Electromagnetic Actuator

Electromagnetic Actuator

Maximum Actuator Force

Vertical: 6 N, Horizontal: 3 N

Vertical: 12 N, Horizontal: 6 N

Degrees of Freedom

6 degrees

6 degrees

Active Isolation Range

0.5 - 100 Hz

0.5 - 100 Hz

Vibration Isolation at ?4 Hz

≥ 90%

≥ 90%

Input Voltage (V)

AC100 - 240V / 50 - 60 Hz / 1A

AC100 - 240V / 50 - 60 Hz / 1A

Power Consumption (W)

Maximum 110W, <50 W in normal operation

Maximum 110W, <50 W in normal operation

Operating Range/Temperature (° C)

5 - 50 °C

5 - 50 °C

Operating Range /Humidity (%)

20 - 90%

20 - 90%