InSEM Microprobe

The InSEM is a tool for characterizing the mechanical properties of surfaces or structures, which is designed to function with sub-nanometer resolution in an in-situ vacuum environment such as an SEM or FIB.
Brand: 
KLA Instruments

The SEM/FIB environment has been called “the lab of the future.”  Any test you can imagine in an macro-lab environment has unique advantages, and some applications are just not possible without the targeting or visualization capabilities of the SEM.

  • Pillars
  • MEMS
  • Micro-targeting
  • Pile-up & sink-in
  • Tensile specimens
  • Indentation
  • Particle crush
  • Micromanipulation

The InSEM is designed to seamlessly integrate high-resolution mechanical testing capabilities into the "lab of the future."

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News, events, promotions, webinars

10/10/2016
5 videos on nanoindentation - It includes the full episode 1 of the webinar series
07/09/2016
How Nanomechanics is Revolutionizing Nanoindenters and Nanoindentation Testing. An interview with Warren Oliver.
11/06/2016
Webinar "Instrumented Indentation - Session 1: Introduction and Overview" Nanoindentation
05/09/2014
Warren Oliver in Rome - October 9, 2014 - Nanomechanics, Inc. - 1st European User Meeting

Application Fields

MEMS characterization/Testing
Material Science
Flexibility

The InSEM is designed to be modular and flexible, to enable a wide range of applications. Port availability on SEM/FIB chambers is often an issue. We've designed the InSEM to mount to a variety of ports, or to be mounted directly on the SEM stage. As different applications call for different system configurations, the InSEM can easily be moved from one port to another, or assembled into the on-stage configuration.

Here's how the InSEM works

The InSEM consists of:

  • an actuator (the force/displacement device)
  • a controller
  • easy-to-use software
  • a micropositioner.  

The micropositioner can be one of three configurations:

  • Chamber mounted linear feed-thru
  • Chamber mounted with multiaxis micropositioners
  • On-stage with micropositioners.
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