IPS3-D

Digital Ion Sputter Gun Controller
Brand: 
OCI Vacuum Microengineering
Category: 
Controllers

FEATURES:

  • Sputter control programming
  • Front panel or computer control via USB
  • Digital precision in setting and stability
  • Rotary optical encoder control on front panel
  • Integration to LabView (TM) or TestPoint (TM)
  • Automatic protection against overload, short circuit and arc

COMPUTER CONTROL SOFTWARE:

For screenshots of timing software for automation to control sputtering process, download the brochure you can find in the Files section.

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Files

AttachmentSize
PDF icon IPS3-D - Digital Ion Sputter Gun Controller - Brochure671.77 KB
Analog Outputs
  • Beam Voltage: positive, 0-3200V
  • Filament Current: 0-4A
  • Focus Voltage: positive, 0-3200V; factor 0.3 - 0.85 of beam voltage
  • Grid Voltage: 150V in reference to filament
  • Emission Current: 0-99mA range
  • Monitoring: all above voltages
  • Display: Vacuum fluorescent display for filament current and beam energy, emission current, program functions
  • Manual Control: Manual control of all voltages and filament current via rotary optical encoder and selection buttons, manual programming available
  • On-Board Automation: Ten adjustable operating programs and also outgassing, standby, filament forming, constant emission current, diagnostics programs
  • PC Control: Full control of all functions, PC software is required, command list for easy custom programming (LabView), DLL, ActiveX available
  • Protection: Over-voltage, over-current and short circuit protection
  • Input Power: 100/110V AC 50/60Hz or 220V/240V AC 50Hz
  • Mechanical: 19" rack mount box with 3U (5.25", 133mm) in height
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