Scientific Equipment
- Home
- Products
- Microscopes for Nanoscale Imaging
- Accessories / Consumables / Software AFM, SPM, STM, SEM, Optical Profilers
- Accessories / Consumables High Vacuum and Ultra High Vacuum (UHV)
- Chambers & Fabrications
- Evaporators
- Feedthrough
- High Vacuum Leak Sealants
- Linear Motion Feedthroughs
- Low Temperature Manipulators
- MBE Systems (Molecular Beam Epitaxy)
- Magnetic Transfer Arm - Miniature
- Magnetic Transfer Rod - Full Size
- Magnetic Wobble Stick
- Magnetron Sputter Sources
- Port Aligners
- Radial Telescopic Transfer Arm
- Rotary Motion Feedthroughs
- Sample Transfer Devices
- UHV Components & Accessories
- VUV Sources
- Vacuum Hardware
- Valves
- Viewports and Viewport Shutters
- Automated recognition systems
- Bio-nanoparticles
- Chemicals
- Devices for Tissue Engineering and Regenerative Medicine
- Digital Microscopy
- Electrophoresis
- Exosome/EV isolation and separation systems
- Gold Coatings
- Holotomographic Microscopy
- Instruments for Measurement and Control of Physical Quantities
- Laboratory Equipment
- Micro CT Scanner Software
- Molecular biology and genomics
- Nanoparticles Analysis
- Optical Tables
- Other common Substrates
- Physical and chemical analysis instruments
- Pneumatic Vibration Isolator
- Profilometers
- Protein Synthesis
- Research Quality Nanoparticles
- Sample Preparation
- Sheet Resistance Mapping
- Silver Coatings
- Single Cell Analysis and Manipulation
- Spin Coaters
- Surface Mechanical Testers
- Thin Films
- Tribology and Mechanical Testing Systems
- Vibration Isolation Systems
- X-ray microtomography
- Applications
- Environmental Monitoring
- MEMS characterization/Testing
- Material Science
- Measurement and Control of Physical Quantities
- Nano-Bio Sciences - Nanobiotechnology
- Nanoparticles
- Nanopharma & Nanomedicine
- Surface Science
- Environmental Air Purification
- Polymerase Chain Reaction (PCR)
- Research, Development & University
- Pharmaceutical Industry & Cosmetics
- Chemical Industry
- Food Industry
- Manufacturing & Control of Polymers
- Paints, Inks & Pigments
- Oil Industry
- Metallic Nanoparticles
- Partners
- Adama Innovations
- Sensofar
- ThetaMetrisis
- Angstrom Engineering
- AppNano
- BIONEER
- CellSorter
- Cordouan Technologies
- CSI Concept Scientific Instruments
- Cytoviva
- Daeil Systems
- DeltaPix
- Digital Surf
- Filmetrics
- GBS-Ilmenau GmbH
- Group3 Technology
- ICAPPIC
- IZON Science
- K&S Advanced Systems
- KLA Instruments
- KLM - Spin Coater
- LS Instruments
- Lyncée Tec
- Mikromasch
- Naneos
- nanoTherics
- Neoscan
- OCI Vacuum Microengineering
- Oxford NanoAnalysis
- Phasis
- Psylotech
- Regemat
- RHK Technology
- Rocky Mountain Nanotechnology
- Sairem
- Semplor
- Sensofar
- Teledyne Hastings
- Tomocube, Inc
- Vacseal Inc.
- X-Rite
- Blog
- About Us
- Contact Us
Filmetrics R-Series resistivity mapping tools marry the sheet resistance technology developed and perfected by KLA for over 45 years with the benchtop instrument technology and user interface refined over the last 20 years by the Filmetrics team.
The 4PP contact four-point probe configuration is recommended for thin metal and ion implant layers, and the non-contact Eddy Current (EC) probe is recommended for thicker metal layers and soft or flexible conductive surfaces. These techniques support a wide range of measurements, including but not limited to the following:
The Filmetrics R50 resistivity mapping system design is optimized to support a wide range of sample types with extended clearance and automated sample point mapping using rectangular, linear, polar and custom configurations.
The KLA Instruments™ R54-Series systems offers the measurement performance of the R50 inside a light-tight enclosure with additional functionality to support automated X-Y-θ stages for full 200mm or 300mm wafer mapping of semiconductor and compound semiconductor wafers.
Files
Application Fields
The Filmetrics R50-4PP contact four-point probe system maps metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity. The 10-decade measurement capability and large Z range make the R50-4PP ideal for a wide variety of applications.
The Filmetrics R50-200-4PP is also available to accommodate larger sample sizes.
The Filmetrics R50-EC non-contact eddy current system maps metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity. The non-contact eddy current sheet resistance measurement is ideal for measuring resistance and film thickness on sensitive and/or flexible conductive surfaces.
The Filmetrics R50-200-EC is also available to accommodate larger sample sizes.
The Filmetrics R54-200 advanced sheet resistance and conductivity mapping systems deliver R50 performance capability within a light-tight enclosure with additional capability to support semiconductor and compound semiconductor applications, including implant and epitaxial wafers.
The Filmetrics R54-200 can be configured as either direct four-point probe (R54-200-4PP) or non-contact eddy current system (R54-200-EC).
The Filmetrics R54-300 advanced sheet resistance mapping system configuration maintains the small footprint of the 200mm system by employing a high precision X-Y-θ stage for superior edge exclusion and high-density mapping. The R54-300 delivers process optimization metrology in a compact benchtop package.
The Filmetrics R54-300 can be configured as either direct four-point probe (R54-300-4PP) or non-contact eddy current (R54-300-EC).
Technical Features
Model
Sensor Type
Measurement Range
Maximum Map Diameter
XY Stage Range
Maximum Sample Height
R50-4PP
Contact 4PP
1mΩ/sq -
200MΩ/sq
100mm
100mm x
100mm
100mm
R50-EC
Non-contact
eddy current
1mΩ/sq -
50Ω/sq
100mm
100mm x
100mm
100mm
R50-200-4PP
Contact 4PP
1mΩ/sq -
200MΩ/sq
200mm
200mm
round
100mm
R50-200-EC
Non-contact
eddy current
1mΩ/sq -
50Ω/sq
200mm
200mm
round
100mm
R54-200-4PP
Contact 4PP
1mΩ/sq -
200MΩ/sq
200mm
200mm x
200mm
15mm
R54-200-EC
Non-contact
eddy current
1mΩ/sq -
50Ω/sq
200mm
200mm x
200mm
15mm
R54-300-4PP
Contact 4PP
1mΩ/sq -
200MΩ/sq
300mm
300mm
round*
15mm
R54-300-EC
Non-contact
eddy current
1mΩ/sq -
50Ω/sq
300mm
300mm
round*
15mm
*Automated X-Y-θ stages