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Classical optical microscopes can be expanded into a fullfledged 3-D surface instrument, significantly increasing their usefulness. Using this measurement principle high-precision 3-D data can be collected throughout the viewable range of the microscope. Various types of 3-D analyses can then be done with the microscope and smartWLI as a basis.
Suitable for all modern microscopes from different manufacturers: Zeiss, Nikon, Mitutoyo, Olympus, Leica
Files
| Attachment | Size |
|---|---|
 smartWLI Microscope - GBS Ilmenau - Brochure | 356.21 KB |
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Technical Features
| Measurement SYSTEM | |
|---|---|
| Measurement Principle | White-light interferometry |
| Z-positioning System | piezo objective adjustment system / stepper motor |
| Height measuring range [µm] | Up to 400 / > 1000 (microscope specific) |
| Measurement Array [Pixel] | 1936x1216 |
| Light source [nm] | microscope lighting system |
| Vertical resolution [nm] | PSI 0.1, VSI: 1.0 / VSI: < 100nm (stepper motor) |
| Max scan speed [µm/s] | 48 |
| Computer, OS | PC or Laptop with Windows 7 |
| Measurement time by z-range 20 μm [s] | <3 |
| Operating temperature [°C] | 10 - 35 |
| Recommended working temperature [°C] | 18 - 22 |
| software | |
|---|---|
| smartWLI | Windows 7, 64bit Software for measuring the topography and for exporting the 3-D data using a direct interface to the MountainsMap® analysis software |
| smartWLI-SDK | SDK for measuring the topography for using in customer own software, Matlab or LabVIEW |
| Export format | ASCII, SUR, BCR-STM, BMP, JPEG, TIFF |
| MountainsMap® | Extensive analysis software as well as profile and 3-D visualisation, measurement data pre- and post-processing, DIN EN ISO roughness and height determination, serial processing, measurement logging |
| OBJECTIVES | ||||||
|---|---|---|---|---|---|---|
| Magnification (MAG) | 2.5x | 5x | 10x | 20x | 50x | 100x |
| Numerical Aperture (NA) | 0.075 | 0.13 | 0.30 | 0.40 | 0.55 | 0.70 |
| Working distance (WD) [mm] | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 |
| Field of view (FOV) [μm] | 7203 x 4524 | 3601 x 2262 | 1800 x 1131 | 900 x 565 | 360 x 226 | 180 x 113 |
| Pixel size [μm] | 3.72 | 1.86 | 0.93 | 0.47 | 0.19 | 0.09 |
| Optical resolution by Dawes [μm] | 3.61 | 2.08 | 0.90 | 0.68 | 0.49 | 0.39 |
| accessories | |
|---|---|
| Motorized XY-stage | Movement dependent on the microscope |
| Stitching | Automated stitching by using motorized stage |