White Light interferometer for industrial applications
Brand:
3D surface sensor optimized for in-line and mobile use requiring high performance in harsh environments with extremely short cycle times.
- FAST - Cycle times below 1 second possible
- ROBUST - optimized for inline applications
Operation without vibration dampening possible.
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Optical 3D sensor based on white-light interferometry
Robust sensor for inline applications with limited or without vibration dumping
- piezo drive for sub-nanometer resolution
- optional mechanical precision axis for extended z-range and cost sensitive projects
- optional utilization of external positioning systems
Speedytec
- massive parallel data processing on GPU's
- exteme fast scanning
- real time 3D evaluation
- optimized for steep structures
- integrated data quality parameter for sample optimized filtering processes
Single objectives
- manual exchangeable
- magnifications from 2.5x ... 100x
smartvis3D dll
- easy integration of all sensor functions into external application
- alternative simplified communication via IO module
- customized communication modules on request
- support various exchange data formats
- optional evaluation processes using Mountains Map or other third party software packages
Vertical Scanning Technology
Vertical scanning principle
- The Piezo lifts the objective in z axis and the camera grabs the images in equidistant steps
- The image stack contains the information to calculate the profile data from the surface
- Each indipendent pixel will show a so named correlogram and the maximum sinus like light variation indicates a defined z-distance from the objective
Interferometry, Interference Objectives, Principles
Exchangeable Interference Objectives
- Mirau objectives are used for higher magnification (10x, 20x, 50x, 100x)
- Michelson objectives are used for lower magnification (2.5x, 5x)
- The objectives are exchangeable and this feature can be used to adapt the system to the necessary field of view and resolution
- Interference pattern will be pictured if object and reference beam have the same length
- The interferometry provides an extreme height resolution of 0.1 nm for all objectives (in contrary to other principles as confocal microscopy and focus variation)
Technical Features
| smartWLI compact | ||
| Measurement Technique | White-light interferometry | |
| Dimension | 218 x 58 x 105 mm | |
| Sensor weight | app. 2kg | |
| Power Supply | 100 to 240 VAC, 50/60 Hz | |
| Algorithms |
Vertical scanning |
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| System Software | smartVis 3D / Speedytec on GPU /real time 3D calculation | |
| Evaluation Software | Mountains Map with GBS programmed extensions | |
| Piezo Scanner | Precision piezo drive with capacitive gauge control up to 400 um z-range VSI: 1 nm z-resolution PSI: 0.1 nm z-resolution |
|
| Precision Axis | Mechanical precision axis up to 5mm z-range VSI: 10nm z-resolution |
|
| high speed camera 1900 x 1200 pixel / 170Hz | |||||||
| Scanning Speed | up to 250 um/s - full camera resolution | ||||||
| Magnification | 2.5x | 5x | 10x | 20x | 50x | 100x | |
| FOV / mm2 | 7.3 x 4.6 | 3.7 x 2.3 | 1.8 x 1.2 | 0.91 x 0.58 | 0.37 x 0.23 | 0.18 x 0.12 | |
| Spacing /um | 3.8 | 1.9 | 0.96 | 0.48 | 0.19 | 0.1 | |
| WD /mm | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2 | |
| high resolution camera / 86Hz | |||||||
| Scanning Speed | up to 120 um/s - full camera resolution | ||||||
| Magnification | 2.5x | 5x | 10x | 20x | 50x | 100x | |
| FOV / mm2 | 6.8 x 5.7 | 3.4 x 2.8 | 1.7 x 1.4 | 0.85 x 0.71 | 0.34 x 0.28 | 0.17 x 0.14 | |
| Spacing /um | 2.8 | 1.4 | 0.69 | 0.35 | 0.14 | 0.07 | |
| WD /mm | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2 | |