smartWLI GBScope

3D profiler with an excellent price performance ratio
Brand: 
GBS-Ilmenau GmbH
Category: 
3D Optical Profilometers Non-contact

The manual turret, with an optional motorized version, simplifies the operation of the fast optical profiler, which provides a measurement volume of 100 × 100 × 50 mm³ (xyz), expandable up to 300 × 300 × 100 mm³ with optional configurations. The turret enables easy identification of small features using low-magnification objectives and allows their immediate replacement with objectives suited for measurement.
The system is an optimized solution for measuring all types of surfaces, except for highly polished optical surfaces and semiconductors. It is particularly well suited for measurement laboratories and research and development applications that require data on surface texture, roughness, and micro-geometry dimensions.

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Application example

Technical Features

Feature

Details

Optical 3D Profiler

Optical 3D Profiler with Motorized XYZ Portal

Objectives

Objective Turret with up to 4 Objectives

Objective Magnifications

5x - 115x

Tube Magnification

0.5x

Measuring Principle

Coherence Scanning (White-Light) Interferometer

Scanning Device

Large Range Z - Stage

Topography Reproducibility

0.5 nm (single scan without profile averaging)

Repeatability RMS

0.05 nm (single scan without profile averaging)

Measuring Volume

100 x 100 x 50 mm³ (XYZ) / optional up to 300 x 300 x 100 mm³ (XYZ)

High Speed Camera

2.3 MP Camera up to 3.2 kfps

Point Evaluation

Massive Parallel in Real Time on the GPGPU

Evaluation Algorithms

VSI (Vertical Scanning Interferometry) / EPSI (Extended Phase Shift Interferometry)
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