The smartWLI nanoscan is a high-resolution 3D optical profilometer designed to measure nanometric structures and functional microstructures with a high aspect ratio. Thanks to its high-magnification blue LED lighting and a 5 MP camera, the system can detect structures with lateral dimensions down to approximately 0.4 µm and a spatial point density as fine as 0.03 µm.
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Key Features:
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High Resolution: Allows for precise measurements of nanometric structures, with a spatial point density down to 0.03 µm.
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Manually Interchangeable Objectives: Provides flexibility in applications, allowing for adaptation to various measurement needs.
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Advanced Software: Includes smartVIS3D measurement software and MountainsMap® evaluation software, facilitating data acquisition and analysis.
GBS ILMENAU
In summary, the smartWLI nanoscan represents an advanced solution for 3D optical profilometry, ideal for applications that require high-resolution measurements of nanostructures and functional microstructures.