smartWLI extended

Universal laboratory measuring system with up to 4 interchangeable lenses

Brand:

Category:

Control Unit

Universal lab measuring system with up to 4 exchangeable objectives and automated objective recognition.

Typical applications:

Attachment	Size
smartWLI extended - GBS ILmenau - Brochure	707.67 KB

30/05/2019

Measurement HEAD
Measurement Principle	White-light interferometry
Z-positioning System	Piezo-based
Height measuring range [µm]	Up to 350
Measurement Array [Pixel]	1936x1216
Light source [nm]	LED 542
Vertical resolution [nm]	PSI: 0.1, VSI: 1.0
Max scan speed [µm/s]	48
Meas. Head overall dimension [mm³]	235 x 80 x 128 (HxWxD)
Measuring head mass [kg]	2
Computer, OS	PC or Laptop with Windows 7
Measurement time by z-range 20 μm [s]	<3
Operating temperature [°C]	10 - 35
Recommended working temperature [°C]	18 - 22

software
smartWLI	Windows 7, 64bit Software for measuring the topography and for exporting the 3-D data using a direct interface to the MountainsMap® analysis software
smartWLI-SDK	SDK for measuring the topography for using in customer own software, Matlab or LabVIEW
Export format	ASCII, SUR, BCR-STM, BMP, JPEG, TIFF
MountainsMap®	Extensive analysis software as well as profile and 3-D visualisation, measurement data pre- and post-processing, DIN EN ISO roughness and height determination, serial processing, measurement logging

OBJECTIVES
Magniﬁcation (MAG)	2.5x	5x	10x	20x	50x	100x
Numerical Aperture (NA)	0.075	0.13	0.30	0.40	0.55	0.70
Working distance (WD) [mm]	10.3	9.3	7.4	4.7	3.4	2.0
Field of view (FOV) [μm]	7203 x 4524	3601 x 2262	1800 x 1131	900 x 565	360 x 226	180 x 113
Pixel size [μm]	3.72	1.86	0.93	0.47	0.19	0.09
Optical resolution by Dawes [μm]	3.61	2.08	0.90	0.68	0.49	0.39

STANDS
Mobile Stand	Suitable for mounting on rollers larger a diameter of 60 mm or planar objects
Manual Stand	Manual XY-Stage (movement 73 x 55 mm²)
Motorized Stand 75 x 50	Motorized XY-Stage (movement 75 x 50 mm²)
Motorized Stand 100 x 100	Motorized XY-Stage (movement 100 x 100 mm²)
Individual Stand	On request

Control Unit


Components
Industrial 19” rack with 6 height units including housing
PC • Windows10 • measuring software smartVIS3D • evaluation software MountainsMap® • 3 height units
scanning device controller • Piezo positioning system (capacitive) • interferometric calibrated • closed loop control for positioning • 3 height units
LED light controller
XY positioning system controller (optional)

Objectives and cameras specification

5 MP high resolution camera
measuring points	2456 x 2054
scanning speed full resolution	77 Hz
scanning speed ROI	up to 2 kHz


objective / magnification	5X	10X	20X	50X	100X	115X*
working distance / mm	9.3	7.4	4.7	3.4	2	0.7
measuring field / mm²	3.4 x 2.8	1.7 x 1.4	0.85 x 0.71	0.34 x 0.28	0.17 x 0.14	0.15 x 0.12
point spacing / µm	1.4	0.69	0.35	0.14	0.07	0.06

2.3 MP high speed camera
measuring points	1920 x 1200
scanning speed full resolution	169 Hz
scanning speed subsampling	533 Hz
scanning speed ROI	up to 3.2 kHz


objective / magnification	5X	10X	20X	50X	100X	115X*
working distance / mm	9.3	7.4	4.7	3.4	2.0	0.7
measuring field / mm²	3.7 x 2.3	1.8 x 1.2	0.91 x 0.58	0.37 x 0.23	0.18 x 0.12	0.16 x 0.1
point spacing / µm	1.9	0.96	0.48	0.19	0.1	0.08

*Olympus 100x WLI objective – the mentioned magnification is calculated in relation to the 100x Nikon objective

Stand and XY positioning table specification

Stand
max. / coarse positioning range (manual Z positioning)	70 mm
fine positioning range (manual Z positioning)	1.9 mm
Tilting angle (levelling device)	± 3°

Positioning tables
positioning area	movement	load capacity	resolution	orthogonality	encoder
73 x 55 mm²	manual	1 Kg	-	-	-
75 x 50 mm²	motorized	1 Kg	0.01 µm	less than 10arcsec	optional
100 x 100 mm²	motorized	2 kg	0.01 µm	less than 10arcsec	optional
150 x 150 mm²	motorized	3 kg	0.01 µm	less than 10arcsec	optional
200 x 200 mm²	motorized	3 kg	0.01 µm	less than 10arcsec	optional
300 x 300 mm²	motorized	5 kg	0.01 µm	less than 5arcsec	optional