TGX Series

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The silicon calibration grating TGX is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.

 

TGX calibration gratings are intended for determination of the tip aspect ratio and for lateral calibration of SPM scanners. The gratings can also be used for detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects.

Technical Features

Part number ........................................................ TGX
Active area ........................................................1 x 1 mm
Chip dimensions ........................................................5 x 5 x 0.3 mm
Edge radii ........................................................< 5 nm
Pitch ........................................................3 μm
Pitch accuracy ........................................................0.1 μm
Step height* ........................................................1 μm

The dimensions marked * are given for reference only.