Smart-WLI Next

Universal lab measuring system with up to 4 objectives and motorized turret
Brand: 
GBS-Ilmenau GmbH
Category: 
3D Optical Profilometers Non-contact

The next generation of high-performance profilometers from GBS

The Smart WLI Next from GBS Ilmenau Gmbh is a universally applicable 3D sensor for nanostructures and micro-geometries.
It has a motorized turret carrying up to four objectives. This means that the compact sensor, which works with white light interferometry, can be used in measuring machines that require a lens change during the measuring process without manual intervention. The scanning software has been also improved so that the maximum measuring speed of all sensors in this series, as well as the resolution in xyz, could be faster than before. While the smallest surface structures can be evaluated even on super-polished surfaces such as the crystal mirror, it is also possible to measure large areas many times faster than before, even with the increased resolution.
For this purpose, the surface is analyzed in a first step with a scan speed of over 1 mm/s and the necessary measuring range for the high-resolution measurement is limited. Even with a high position tolerance and inclined surfaces with a height difference of several 100μ, individual measurements can be carried out from 1 to 2s and larger areas with several 100μ individual measurements can be recorded in a few minutes.

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Files

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PDF icon Smart WLI NEXT - Brochure541.83 KB

News, events, promotions, webinars

17/02/2026
Schaefer Sponsors CNR-IMM 2026 “BRIDGE” Congress – Catania, February 18–19, 2026
10/02/2026
Schaefer SEE at the Optical 3D Metrology Workshop in Perugia: Form and Surface Serving Advanced Manufacturing Processes
04/02/2026
"Schaefer SEE sponsors MecNanO GM 2026 – Mechanics of Materials, Nanomechanics, Surfaces, Films"
30/05/2019
GBS Ilmenau - Unique profilometry features presented at the Control Show 2019

Application Fields

Material Science
Surface Roughness

Technical Features

General Specifications

measurement technique

white-light interferometry

measurement software

smartVIS3D

evaluation software

MountainsMap® with optional GBS add-on modules

scanning device

piezo positioning system

scan range

200 µm

extended scanning range

optional with (additional) motorized scanning axis up to 200 mm

digitalization

up to 0.01 pm

system noise / topography reproducibility Nm*

< 0.08 nm (5 MP camera) / < 0.12 nm (2.3 MP camera)

1-σ reproducibility 0.4 µm step height

< 1 nm

1-σ reproducibility 12 µm step height

< 3 nm

1-σ reproducibility 100 µm step height

< 20 nm

sensor weight

approx. 5 kg

relative humidity, non-condensing

up to 80%

operation temperature

10 °C to 35 °C

power supply

100 to 240 VAC, 50/60 Hz

*Sq/√2 – profile difference of 2 scans, 10x objective, EPSI, single scan, without profile averaging, laboratory conditions, 1 million points after 3x3 denoising filter

Camera and speed specification

2.3 MP high speed camera

5 MP high speed camera

camera speed full resolution

169 Hz (1920 x 1200 measuring points)

77 Hz (2456 x 2054 measuring points)

scanning speed full resolution
smallest increment

11,4 µm/s

5.2 µm/s

scanning speed full resolution
5x extended increments

56 µm/s

26 µm/s

camera speed subsampling

533 Hz (960 x 600 measuring points)

subsampling not available

scanning speed subsampling
smallest increment

35,7 µm/s

subsampling not available

scanning speed subsampling
5x extended increments

178,5 µm/s

subsampling not available

camera speed medium ROI

1.4 kHz (400 x 400 measuring points)

340 Hz (2456 x 400) measuring points)

scanning speed medium ROI
smallest increment

93,8 µm/s

22,8 µm/s

scanning speed medium ROI
5x extended increments

469 µm/s

114 µm/s

camera speed small ROI

3.2 kHz (1920 x 36 measuring points)

2 kHz (2456 x 2 measuring points)

scanning speed small ROI
smallest increment

214,4 µm/s

134 µm/s

scanning speed small ROI
5x extended increments

1.072 µm/s

670 µm/s

ROI

increased speed for less camera lines and rows

increased speed for less lines

data calculation

real time calculation of the 3d data on a GPGPU (general purpose graphic processing unit) with up to 10 TFLOPS

real time calculation of the 3d data on a GPGPU (general purpose graphic processing unit) with up to 10 TFLOPS

supported scanning increments

1x, 3x, 5x, 7x, 11x

1x, 3x, 5x, 7x, 11x

high-speed "prescan"
and z-range determination

the "prescan" can be used to determine and reduce the necessary z-range for high resolution measurements automatically
this reduce the measuring time for surfaces with variable position inside of the scanning range drastically

the "prescan" can be used to determine and reduce the necessary z-range for high resolution measurements automatically
this reduce the measuring time for surfaces with variable position inside of the scanning range drastically
Objectives specification

magnification

5x

10x

20x

50x

100x

115x*

working distance / mm

9.3

7.4

4.7

3.4

2

0.7

aperture

0.13

0.3

0.4

0.55

0.7

0.8

2.3 MP Camera - measuring field / mm²

3.7 x 2.3

1.8 x 1.2

0.91 x 0.58

0.37 x 0.23

0.18 x 0.12

0.16 x 0.1

2.3 MP Camera - point spacing camera / µm

1.9

0.96

0.48

0.19

0.1

0.08

2.3 MP Camera - spacing super resolution / µm

0.63

0.32

0.16

0.063

0.033

0.027

5 MP camera - measuring field / mm²

3.4 x 2.8

1.7 x 1.4

0.85 x 0.71

0.34 x 0.28

0.17 x 0.14

0.15 x 0.12

5 MP camera point spacing camera / µm

1.4

0.69

0.35

0.14

0.07

0.06

5 MP camera - spacing super resolution / µm

0.47

0.23

0.12

0.047

0.023

0.02

*115x objective –100x objective with a calculated relative magnification in relation to the 100x Nikon objective

Small stands and xy stages
Stand

max. / coarse positioning range (manual z positioning)

70 mm

fine positioning range (manual z positioning)

1.9 mm

tilting angle (levelling device)

± 3°
XY stages

positioning area

movement

load capacity

resolution

orthogonality

encoder

73 x 55 mm²

manual

1 kg

-

-

-

75 x 50 mm²

motorized

1 kg

0.01 µm

optional

100 x 100 mm²

motorized

2 kg

0.01 µm

optional

150 x 150 mm²

motorized

3 kg

0.01 µm

optional

200 x 200 mm²

motorized

3 kg

0.01 µm

optional

300 x 300 mm²

motorized

5 kg

0.01 µm

optional
Control unit

Components

Industrial 19" rack with housing

High performance PC
Windows10
measuring software smartVIS3D
evaluation software MountainsMap®

Scanning device controller
piezo positioning system (capacitive)
interferometric calibrated
closed loop control for positioning

LED light controller

XY positioning system controller (optional)
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